Oxygen Partial Pressure Control (λ probe)
The TH Series in-line Low-E glass coating system employs lambda sensor control for reactive sputtering using oxygen as the reactive gas. It continuously measures oxygen partial pressure inside the process compartment and maintains it at the required setpoint through closed-loop control, ensuring stable process conditions and consistent film quality.
- Precise Oxygen Control: Direct measurement of oxygen partial pressure provides continuous feedback to the reactive gas control loop, maintaining stable process at the target operating point.
- Oxide Film Deposition: Well-suited for reactive sputtering processes using oxygen as the reactive gas to deposit oxide films.
- Controlled optical properties: Precise process control provides control over the optical constants n and k to maintain consistent optical properties in the deposited film.
- Uniformity Along Long Cathodes: Multiple modules can be arranged along the coating width to provide more localized control, improving film uniformity across long cathodes.
Working Principle
A high-precision oxygen sensor based on a zirconia solid electrolyte continuously monitors the oxygen partial pressure inside the process compartment and feeds the signal directly to a closed-loop control system. The control system then regulates oxygen flow to maintain the partial pressure at the level required by the coating process.
CNBM Optoelectronic Equipment (Taicang) Co., Ltd., established in 2009, is a wholly owned subsidiary of China Triumph International Engineering Co., Ltd. (CTIEC). The company specializes in large-area magnetron sputtering coating equipment, with Low-E glass coating lines as its core business. Its 100,000 m² manufacturing base includes an R&D center and nearly 20,000 m² of assembly and commissioning facilities. The company provides equipment R&D, engineering design, manufacturing, installation, commissioning, training and system upgrades. Its coating lines support single-, double- and triple-silver Low-E glass, solar-control glass and other functional coatings. More than 20 Low-E coating lines have been delivered and put into commercial operation. Projects are supplied as complete coating systems or turnkey solutions according to customers’ glass sizes, coating processes and production requirements.
