Top-pumping Cathode
Integrates the rotary cathode and turbomolecular pump into one compact unit for in-line Low-E magnetron sputtering lines — ideal where space is limited or additional cathodes are needed without significantly extending the line.
The advantages of Top-pumping cathodes vary depending on whether they are added to an existing line or built into a new one:
- Existing Coating Line Upgrades: When additional cathodes are required, the existing line can be upgraded with fewer additional process chambers — in some cases, no new chamber is needed at all. This reduces modification work, shortens upgrade time, lowers costs, and minimizes disruption to normal production.
- New Coating Line Installation: The shorter overall line layout makes it easier to fit a Low-E coating line into an existing workshop. It can also reduce the required building length for a new facility, as well as investment in civil works and utility infrastructure.
Since the rotary cathode and its turbomolecular pump are integrated on the same lid, both require less space within the coating line. As a result, fewer process chamber sections are needed and the overall line can be shorter, making upgrades and new installations easier to plan. For existing Low-E lines, reduced chamber modification and shorter shutdown periods help lower upgrade costs and production losses. For new lines, the more compact layout reduces the required workshop length and can lower investment in civil works and utility infrastructure.
